300 mm
300 mm (12") wafers were introduced in 1995. Over the last few years, we have seen a tremendous increase in 300 mm usage. Nearly all of the major chip manufacturers have already or have plans to build 300 mm fabs and many equipment manufacturers are busy producing new tools to accomodate 12" wafers. All 300 mm wafers are double-side polished and have a notch identical to the notch found on 200 mm wafers. There are many different grades of 300 mm wafers and SVM is happy to be able to accommodate a very wide variety of customers.
If you do not see the specification you are looking for, please contact SVM to speak with a member of our experienced and knowledgeable sales staff.
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300 +/- 0.5 mm
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Diameter
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300 +/- 0.5 mm
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300 +/- 0.5 mm
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300 +/- 0.5 mm
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300 +/- 0.5 mm
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300 +/- 0.5 mm
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300 +/- 0.5 mm
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P+
300 +/- 0.5 mm
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P+
300 +/- 0.5 mm
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P+
300 +/- 0.5 mm
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Type / Dopant
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P/Boron
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P/Boron
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P/Boron
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P/Boron
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P/Boron
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P/Boron
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P/Boron
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P/Boron
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P/Boron
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Orientation
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{100} +/- 1º
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{100} +/- 1º
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{100} +/- 1º
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{100} +/- 1º
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{100} +/- 1º
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{100} +/- 1º
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{100} +/- 1º
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{100} +/- 1º
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{100} +/- 1º
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Growth Method
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Cz
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Cz
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Cz
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Cz
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Cz
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Cz
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Cz
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Cz
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Cz
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Resistivity
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1 - 30 Ω-cm
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1 - 30 Ω-cm
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1 - 30 Ω-cm
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1 - 100 Ω-cm
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1 - 100 Ω-cm
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1 - 100 Ω-cm
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0.005 - 0.02 Ω-cm
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0.005 - 0.02 Ω-cm
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0.005 - 0.02 Ω-cm
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Radial Resistivity Gradient (RRG)
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<= 10%
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<= 10%
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Oxygen Concentration
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<= 30 ppma
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<= 30 ppma
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Carbon Concentration
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<= 1 ppma
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<= 1 ppma
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Surface Metals
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<= 1xE10
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<= 1xE10
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Thickness
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750 - 800 μm
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750 - 800 μm
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750 - 800 μm
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750 - 800 μm
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750 - 800 μm
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750 - 800 μm
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750 - 800 μm
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750 - 800 μm
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750 - 800 μm
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TTV
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<= 2 μm
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<= 2 μm
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<= 2 μm
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<= 2 μm
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<= 2 μm
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<= 2 μm
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<= 2 μm
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GBIR
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<= 5 μm
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<= 5 μm
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Site Flatness (STIR)
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< 0.25 μm
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< 0.25 μm
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<= 0.13 μm
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Bow/Warp
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<= 40 μm
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<= 40 μm
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<= 40 μm
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Front Surface
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Polished
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Polished
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Polished
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Polished
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Polished
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Polished
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Polished
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Polished
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Polished
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Back Surface
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Polished
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Polished
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Polished
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Polished
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Polished
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Polished
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Polished
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Polished
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Polished
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Particle Count
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<= 50@ >= 0.09 μm
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<= 50@ >= 0.12 μm
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<= 50@ >= 0.16 μm
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<= 30@ >= 0.2 μm
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<= 100@ >= 0.2 μm
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<= 50@ >= 0.12 μm
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<= 50@ >= 0.16 μm
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<= 200@ >= 0.2 μm
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Notch
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SEMI Standard
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SEMI Standard
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SEMI Standard
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SEMI Standard
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SEMI Standard
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SEMI Standard
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SEMI Standard
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SEMI Standard
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